11 |
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Growth and characterization of shape memory alloy thin films for Si microactuator technologies/
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Frantz-Rodriguez, N Morante, J R; Granchamp, J P; P�rez-Rodr�uez, A; Dufour-Gergam, E; Yaakoubi, N Mart�ez, S; Bosseboeuf, A; Montserrat, J; Serre, C; Esteve, J;
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Chapman and Hall
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2001
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