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A Practice of T^2-Q Control Charts in Semiconductor Manufacturing Process -A paradigm shift from monitoring the amount of variation to monitoring the pattern of variation- / Higashide, M.; Nishina, K.; Kawamura, H. / Nihon Hinshitsu Kanri Gakkai / 品質 : Quality, JSQC : Journal of the Japanese Society for Quality Control / 77-86 / 2014
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