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IEEE transactions on semiconductor manufacturing:a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council / IEEE Components, Hybrids, and Manufacturing Technology Society IEEE Electron Devices Society IEEE Reliability Society IEEE Solid-State Circuits Coun / Institute of Electrical and Electronics Engineers / 621.38152 I22a / 621.38152 / 1988- / 중앙도서관
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