| LDR | | 02139casuu2200457 a 4500 |
| 001 | | 000000180641 |
| 005 | | 20011013092109 |
| 008 | | 870709c19889999nyuqr1p 0 a0eng d |
| 010 | |
▼a 88659341
▼z sn 87002625 |
| 022 | 0 |
▼a 0894-6507 |
| 032 | |
▼a 001891
▼b USPS |
| 035 | |
▼a (OCoLC)16152423 |
| 035 | |
▼a 000088659341 |
| 040 | |
▼a NSDP
▼c NSDP
▼d 225009
▼d NSDP
▼d OCoLC
▼d NSDP
▼d NIC
▼d DLC
▼d NSDP
▼d NST
▼d DLC
▼d NST
▼d MH
▼d NST |
| 042 | |
▼a nsdp
▼a lc |
| 050 | 00 |
▼a TK7836
▼b .I39 |
| 082 | 00 |
▼a 621.3815/2
▼2 19 |
| 090 | |
▼a 621.38152
▼b I22a
▼c v.1- |
| 093 | |
▼a 598439
▼v v.8-9
▼a 598440
▼v v.10
▼a 694415
▼v v.11
▼a 694416
▼v v.12
▼a 750401
▼v v.13
▼x P |
| 210 | 0 |
▼a IEEE trans. semicond. manuf. |
| 212 | 0 |
▼a Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing |
| 222 | 0 |
▼a IEEE transactions on semiconductor manufacturing |
| 245 | 00 |
▼a IEEE transactions on semiconductor manufacturing:
▼b a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council. |
| 246 | 10 |
▼a Transactions on semiconductor manufacturing. |
| 246 | 10 |
▼a Semiconductor manufacturing. |
| 260 | |
▼a New York, N.Y.:
▼b Institute of Electrical and Electronics Engineers,
▼c c1988-9999. |
| 265 | |
▼a IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331 |
| 300 | |
▼a v.:
▼b ill.;
▼c 28 cm. |
| 310 | |
▼a Quarterly |
| 350 | |
▼a $14.00 (members)
▼a $24.00 (non-members) |
| 362 | 0 |
▼a Vol. 1, no. 1 (Feb. 1988)- |
| 500 | |
▼a Title from cover. |
| 530 | |
▼a Available in microfiche and microfilm. |
| 650 | 0 |
▼a Semiconductors
▼x Design and construction
▼x Periodicals. |
| 710 | 20 |
▼a IEEE Components, Hybrids, and Manufacturing Technology Society. |
| 710 | 20 |
▼a IEEE Electron Devices Society. |
| 710 | 20 |
▼a IEEE Reliability Society. |
| 710 | 20 |
▼a IEEE Solid-State Circuits Council. |
| 710 | 20 |
▼a Institute of Electrical and Electronics Engineers. |
| 866 | |
▼a 225009
▼b v.1:no.2(1988)-v.1:no.4(1988), v.2(1989)-v.13(2000) |
| 990 | |
▼b 송규남 |