| LDR | | 00000cas u2200205 a 4500 |
| 001 | | 000000192579 |
| 005 | | 20130816154048 |
| 008 | | 910321c19919999nyubr1p 0 a0eng d |
| 010 | |
▼a 94657460
▼z sn 92021098 |
| 022 | 0 |
▼a 1071-1023
▼y 0734-211X |
| 035 | |
▼a (OCoLC)23276603 |
| 040 | |
▼a NcRS
▼c NcRS
▼d 225009
▼d MCM
▼d NSDP
▼d DLC
▼d InU
▼d OCoLC |
| 042 | |
▼a lc
▼a nsdp |
| 050 | 00 |
▼a TJ940
▼b .J669 |
| 082 | 00 |
▼a 621.381/05
▼2 20 |
| 090 | |
▼a 621.5505
▼b J86B
▼c v.9- |
| 210 | 0 |
▼a J. vac. sci. technol., B, Microelectron. nanometer struct. process. meas. phenom. |
| 222 | 0 |
▼a Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |
| 245 | 00 |
▼a Journal of vacuum science & technology.
▼n B,
▼p Microelectronics and nanometer structures. |
| 246 | 10 |
▼a Microelectronics and nanometer structures. |
| 246 | 10 |
▼a Journal of vacuum science and technology.
▼n B,
▼p Microelectronics and nanometer structures. |
| 246 | 10 |
▼a JVST B. |
| 260 | |
▼a New York:
▼b Published for the Society by the American Institute of Physics,
▼c c1991-. |
| 265 | |
▼a AIP Subscription Fulfillment Division, 500 Sunnyside Blvd., Woodbury, NY 11797 |
| 300 | |
▼a v.:
▼b ill.;
▼c 29 cm. |
| 310 | |
▼a Bimonthly |
| 362 | 0 |
▼a 2nd ser., v. 9, no. 1 (Jan./Feb. 1991)- |
| 500 | |
▼a Title from cover. |
| 500 | |
▼a On cover, <Sept./Oct. 1994->: JVST B. |
| 510 | 1 |
▼a Computer & control abstracts
▼x 0036-8113 |
| 510 | 1 |
▼a Electrical & electronics abstracts
▼x 0036-8105 |
| 510 | 1 |
▼a Physics abstracts. Science abstracts. Series A
▼x 0036-8091 |
| 510 | 1 |
▼a SPIN |
| 510 | 2 |
▼a Chemical abstracts
▼x 0009-2258 |
| 510 | 2 |
▼a Coal abstracts
▼x 0309-4979 |
| 510 | 2 |
▼a Current physics index
▼x 0098-9819 |
| 510 | 2 |
▼a Metals abstracts
▼x 0026-0924 |
| 510 | 2 |
▼a World aluminum abstracts
▼x 0002-6697 |
| 580 | |
▼a Includes: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, and: North American Conference on Molecular Beam Epitaxy. Papers from the ... North American Conference on Molecular Beam Epitaxy, also published separately. |
| 580 | |
▼a Includes as the Nov./Dec. issue, 1993- : International Symposium on Electron, Ion, and Photon Beams. Papers from the ... International Symposium on Electron, Ion, and Photon Beams. |
| 580 | |
▼a Includes an issue: U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds. Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds. |
| 650 | 0 |
▼a Vacuum technology
▼x Periodicals. |
| 650 | 0 |
▼a Microelectronics
▼x Periodicals. |
| 650 | 0 |
▼a Nanoparticles
▼x Measurement
▼x Periodicals. |
| 710 | 20 |
▼a American Vacuum Society. |
| 780 | 00 |
▼t Journal of vacuum science & technology. B, Microelectronics processing and phenomena
▼x 0734-211X
▼w (DLC) 83642371
▼w (OCoLC)8697479 |
| 787 | 1 |
▼a Molecular Beam Epitaxy Workshop.
▼t Proceedings of the ... Molecular Beam Epitaxy Workshop
▼x 1069-3351
▼w (DLC) 94658569
▼w (OCoLC)27992608 |
| 787 | 1 |
▼a U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds.
▼t Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds
▼x 1063-9039
▼w (DLC) 93643352
▼w (OCoLC)26336322 |
| 787 | 1 |
▼a International Symposium on Electron, Ion, and Photon Beams.
▼t Papers from the ... International Symposium on Electron, Ion, and Photon Beams
▼w (DLC) 94657484
▼w (OCoLC)29331637 |
| 787 | 1 |
▼a North American Conference on Molecular Beam Epitaxy.
▼t Papers from the ... North American Conference on Molecular Beam Epitaxy
▼x 1074-9721
▼w (DLC) 94658570
▼w (OCoLC)29896172 |
| 866 | |
▼a v.9(1991)-v.16(1998), v.17:no.2-6(1999)-v.21(2003), v.22: no.1-2,4-6(2004), v.23(2005)-v.30(2012) |
| 990 | |
▼a 김미정
▼b 육상옥
▼b 송규남 |