| 581 |
|
SiO~2 etching with perfluorobutadiene in a dual frequency plasma reactor/
|
Fracassi, F
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 582 |
|
SiO2 films deposited on silicon at low temperature by plasma-enhanced decomposition of hexamethyldisilazane: Defect characterization/
|
Croci, S
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 583 |
|
Solid particle production in fluorocarbon plasmas. I. Correlation with polymer film deposition/
|
Takahashi, Kazuo
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 584 |
|
Sound velocity and Young's modulus in plasma deposited amorphous hydrogenated carbon/
|
Dillon, R O
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 585 |
|
Spatial distributions of the absolute CF and CF2 radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation/
|
Nakamura, Masayuki
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 586 |
|
Spatially resolved mass spectrometric sampling of inductively coupled plasmas using a movable sampling orifice/
|
Li, X
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 587 |
|
Spectra mapping of scanning tunneling microscope-induced light from electrochemically deposited Ag films on Au/
|
Nishitani, R
|
Published for the Society by the American Institute of Physics
|
2000
|
|
|
|
| 588 |
|
Spectroscopic ellipsometry measurements of chromium nitride coatings/
|
Aouadi, S M
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 589 |
|
Spectroscopic study of plasma using zirconium tetra-tert-butoxide for the plasma enhanced chemical vapor deposition of zirconium oxide/
|
Cho, Byeong-Ok
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 590 |
|
Stability of carbon subatomic films on metal surface against bombardment by low-energy gas ions/
|
Babaev, V. P
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 591 |
|
Stabilization of zinc-blende cubic AIN in AIN/W superlattices/
|
Kim, I W
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 592 |
|
Stable and unstable behavior of inductively coupled electronegative discharges/
|
Marakhtanov, A. M
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 593 |
|
Standards for surface analysis: ASTM committee E-42 on surface analysis/
|
Czanderna, A. W
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 594 |
|
Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope/
|
Sundararajan, Sriram
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 595 |
|
Steady-state direct-current plasma immersion Ion implantation using a multipolar magnetic field electron cyclotron resonance plasma source/
|
Zeng, Xuchu
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 596 |
|
Sticking coefficient of boron and phosphorus on silicon during vapor-phase doping/
|
Kiyota, Yukihiro
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 597 |
|
Structural and electrical characteristics of chemical vapor deposited W/n-Si0.83Ge0.17/Si(001) and chemical vapor deposited WSix/n-Si0.83Ge0.17/Si(001)/
|
Jang, Y C
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
| 598 |
|
Structural and electrical characteristics of the interfacial layer of ultrathin ZrO~2 films on partially strain compensated Si~0~.~6~9Ge~0~.~3C~0~.~0~1 layers/
|
Mahapatra, R
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 599 |
|
Structural and electrical characteristics of W-N thin films prepared by reactive rf sputtering/
|
Jiang, P.-C
|
Published for the Society by the American Institute of Physics
|
2003
|
|
|
|
| 600 |
|
Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition/
|
Engelmark, F
|
Published for the Society by the American Institute of Physics
|
2001
|
|
|
|
Valentini, L
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