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제한항목: 2000; Electrochemical Society

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검색리스트 테이블
No	서명	저자	발행처	원문제공시작년
1	Dielectric Science and Materials - Characteristics of TEOS Polysilicon Oxides: Improvement by CMP and High Temperature RTA N2/N2O Annealing/	Chen, J H	Electrochemical Society	2000

2	Dielectric Science and Materials - Chemical Mechanical Polishing of Low Dielectric Constant Oxide Films Deposited Using Flowfill Chemical Vapor Deposition Technology/	Cui, H	Electrochemical Society	2000

3	Dielectric Science and Materials - Effect of Surface Treatments on the Electrical Properties of Fluorinated Silicon Oxides/	Chang, W J	Electrochemical Society	2000

4	Dielectric Science and Materials - Electrical Properties of SrTiO3/BaTiO3 Strained Superlattice Films Prepared by Atomic layer Mitallorganic Chemical Vapor Deposition/	Wang, Z	Electrochemical Society	2000

5	Dielectric Science and Materials - Hydrogen in Buried SiO2 Layers/	Rev�sz, A G	Electrochemical Society	2000

6	Dielectric Science and Materials - Investigation of the Electrical Properties of Tantalum-Ruthenium Dioxide as a Diffusion Barrier for High Dielectric Capacitors/	Yoon, D-S	Electrochemical Society	2000

7	Dielectric Science and Materials - Low Temperature Chemical Vapor Deposition of ZrO2 on Si(100) Using Anhydrous Zirconium(IV) Nitrate/	Smith, R C	Electrochemical Society	2000

8	Dielectric Science and Materials - Precise Chrome Etching in Downstream Chlorine Plasmas with Electron Depletion Through Negative Ion Production/	Ichiki, T	Electrochemical Society	2000

9	Dielectric Science and Materials - Reliability of Fluorinated Silicon Oxide Film Prepared by Temperature Difference-Based Liquid Phase Deposition/	Yeb, C-F	Electrochemical Society	2000

10	Dielectric Science and Materials - Run-to-Run Evolution of Fluorocarbon Radicals in C4F8 Plasmas Interacting with Cold and Hot Inner Walls/	Oshio, H	Electrochemical Society	2000

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