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유형		 서명 저자 발행처 원문제공시작년 수록
매체
21 저널기사 SiO2 films deposited on silicon at low temperature by plasma-enhanced decomposition of hexamethyldisilazane: Defect characterization/ 미리보기
Croci, S Published for the Society by the American Institute of Physics 2001
22 저널기사 Solid particle production in fluorocarbon plasmas. I. Correlation with polymer film deposition/ 미리보기
Takahashi, Kazuo Published for the Society by the American Institute of Physics 2001
23 저널기사 Sound velocity and Young's modulus in plasma deposited amorphous hydrogenated carbon/ 미리보기
Dillon, R O Published for the Society by the American Institute of Physics 2001
24 저널기사 Spatial distributions of the absolute CF and CF2 radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation/ 미리보기
Nakamura, Masayuki Published for the Society by the American Institute of Physics 2001
25 저널기사 Spatially resolved mass spectrometric sampling of inductively coupled plasmas using a movable sampling orifice/ 미리보기
Li, X Published for the Society by the American Institute of Physics 2003
26 저널기사 Spectra mapping of scanning tunneling microscope-induced light from electrochemically deposited Ag films on Au/ 미리보기
Nishitani, R Published for the Society by the American Institute of Physics 2000
27 저널기사 Spectroscopic ellipsometry measurements of chromium nitride coatings/ 미리보기
Aouadi, S M Published for the Society by the American Institute of Physics 2001
28 저널기사 Spectroscopic study of plasma using zirconium tetra-tert-butoxide for the plasma enhanced chemical vapor deposition of zirconium oxide/ 미리보기
Cho, Byeong-Ok Published for the Society by the American Institute of Physics 2001
29 저널기사 Stability of carbon subatomic films on metal surface against bombardment by low-energy gas ions/ 미리보기
Babaev, V. P Published for the Society by the American Institute of Physics 2003
30 저널기사 Stabilization of zinc-blende cubic AIN in AIN/W superlattices/ 미리보기
Kim, I W Published for the Society by the American Institute of Physics 2001
31 저널기사 Stable and unstable behavior of inductively coupled electronegative discharges/ 미리보기
Marakhtanov, A. M Published for the Society by the American Institute of Physics 2003
32 저널기사 Standards for surface analysis: ASTM committee E-42 on surface analysis/ 미리보기
Czanderna, A. W Published for the Society by the American Institute of Physics 2003
33 저널기사 Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope/ 미리보기
Sundararajan, Sriram Published for the Society by the American Institute of Physics 2001
34 저널기사 Steady-state direct-current plasma immersion Ion implantation using a multipolar magnetic field electron cyclotron resonance plasma source/ 미리보기
Zeng, Xuchu Published for the Society by the American Institute of Physics 2001
35 저널기사 Sticking coefficient of boron and phosphorus on silicon during vapor-phase doping/ 미리보기
Kiyota, Yukihiro Published for the Society by the American Institute of Physics 2001
36 저널기사 Structural and electrical characteristics of chemical vapor deposited W/n-Si0.83Ge0.17/Si(001) and chemical vapor deposited WSix/n-Si0.83Ge0.17/Si(001)/ 미리보기
Jang, Y C Published for the Society by the American Institute of Physics 2001
37 저널기사 Structural and electrical characteristics of the interfacial layer of ultrathin ZrO~2 films on partially strain compensated Si~0~.~6~9Ge~0~.~3C~0~.~0~1 layers/ 미리보기
Mahapatra, R Published for the Society by the American Institute of Physics 2003
38 저널기사 Structural and electrical characteristics of W-N thin films prepared by reactive rf sputtering/ 미리보기
Jiang, P.-C Published for the Society by the American Institute of Physics 2003
39 저널기사 Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition/ 미리보기
Engelmark, F Published for the Society by the American Institute of Physics 2001
40 저널기사 Structural and mechanical characterization of fluorinated amorphous-carbon films deposited by plasma decomposition of CF4-CH4 gas mixtures/ 미리보기
Jacobsohn, L G Published for the Society by the American Institute of Physics 2000
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