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1 저널기사 Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatus/ 미리보기
Liu, H Published for the Society by the American Institute of Physics 2003
2 저널기사 Adsorption and reaction of NO on oxidized and reduced SrTiO~3(100) surfaces/ 미리보기
Azad, S Published for the Society by the American Institute of Physics 2003
3 저널기사 Aluminum diffusion and nitrogen sputter yield for nitrogen plasma immersion ion implantation into aluminum/ 미리보기
Manova, D Published for the Society by the American Institute of Physics 2003
4 저널기사 American Vacuum Society leadership in electronic materials processing: Past, present, and future/ 미리보기
Lucovsky, G Published for the Society by the American Institute of Physics 2003
5 저널기사 Analysis of stresses in Ru thin films prepared by chemical vapor deposition/ 미리보기
Lim, H. J Published for the Society by the American Institute of Physics 2003
6 저널기사 Antimony segregation in the oxidation of AlAsSb interlayers/ 미리보기
Andrews, A. M Published for the Society by the American Institute of Physics 2003
7 저널기사 Application-driven development of plasma source technology/ 미리보기
Hopwood, J Published for the Society by the American Institute of Physics 2003
8 저널기사 Atomic layer deposition of Al~2O~3 thin films using dimethylaluminum isopropoxide and water/ 미리보기
Cho, W Published for the Society by the American Institute of Physics 2003
9 저널기사 Atomic layer deposition of zirconium silicate films using zirconium tetra-tert-butoxide and silicon tetrachloride/ 미리보기
Kim, W.-K Published for the Society by the American Institute of Physics 2003
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