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Journal of vacuum science & technology.B,Microelectronics and nanometer structures

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상세정보
자료유형	연속간행물
단체저자명	American Vacuum Society.
서명/저자사항	Journal of vacuum science & technology.B,
권.연차 사항	2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-
발행사항	New York: Published for the Society by the American Institute of Physics, c1991-.
형태사항	v.: ill.; 29 cm.
딸림자료
간행빈도	Bimonthly
축약서명	J. vac. sci. technol., B, Microelectron. nanometer struct. process. meas. phenom.
등록서명	Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
부분서명	Microelectronics and nanometer structures.
부분서명	Journal of vacuum science and technology.Microelectronics and nanometer structures.
부분서명	JVST B.

ISSN	1071-1023
일반주기	Title from cover. On cover, <Sept./Oct. 1994->: JVST B.
색인/초록 수록지	Computer & control abstracts0036-8113 Electrical & electronics abstracts0036-8105 Physics abstracts. Science abstracts. Series A0036-8091 SPIN Chemical abstracts0009-2258 Coal abstracts0309-4979 Current physics index0098-9819 Metals abstracts0026-0924 World aluminum abstracts0002-6697
연관저록주기	Includes: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, and: North American Conference on Molecular Beam Epitaxy. Papers from the ... North American Conference on Molecular Beam Epitaxy, also published separately. Includes as the Nov./Dec. issue, 1993- : International Symposium on Electron, Ion, and Photon Beams. Papers from the ... International Symposium on Electron, Ion, and Photon Beams. Includes an issue: U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds. Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds.
일반주제명	Vacuum technology -- Periodicals. Microelectronics -- Periodicals. Nanoparticles -- Measurement -- Periodicals.
언어	영어
선행저록	Journal of vacuum science & technology. B, Microelectronics processing and phenomena,0734-211X,(DLC) 83642371,(OCoLC)8697479