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21 저널기사 An anomalous erosion of a rectangular magnetron system/ 미리보기
Shidoji, Eiji Published for the Society by the American Institute of Physics 2000
22 저널기사 Angular dependence of SiO2 etching in a fluorocarbon plasma/ 미리보기
Cho, Byeong-Ok Published for the Society by the American Institute of Physics 2000
23 저널기사 Angular dependence of the surface excitation probability for medium energy electrons backscattered from Al and Si surfaces/ 미리보기
Werner, Wolfgang S M Published for the Society by the American Institute of Physics 2001
24 저널기사 Antimony segregation in the oxidation of AlAsSb interlayers/ 미리보기
Andrews, A. M Published for the Society by the American Institute of Physics 2003
25 저널기사 Application-driven development of plasma source technology/ 미리보기
Hopwood, J Published for the Society by the American Institute of Physics 2003
26 저널기사 Application of magnetic neutral loop discharge plasma in deep silica etching/ 미리보기
Chen, W Published for the Society by the American Institute of Physics 2001
27 저널기사 Aspect ratio dependent plasma-induced charging damage in rf precleaning of a metal contact/ 미리보기
Kim, J Published for the Society by the American Institute of Physics 2001
28 저널기사 Atomic force microscopy investigation of nanometer-scale modifications of polymer morphology caused by ultraviolet irradiation/ 미리보기
Nowicki, M Published for the Society by the American Institute of Physics 2000
29 저널기사 Atomic layer deposition of Al~2O~3 thin films using dimethylaluminum isopropoxide and water/ 미리보기
Cho, W Published for the Society by the American Institute of Physics 2003
30 저널기사 Atomic layer deposition of zirconium silicate films using zirconium tetra-tert-butoxide and silicon tetrachloride/ 미리보기
Kim, W.-K Published for the Society by the American Institute of Physics 2003
31 저널기사 Author Index to Volume 18 /// 미리보기
Published for the Society by the American Institute of Physics 2000
32 저널기사 Author Index to Volume 19 /// 미리보기
Published for the Society by the American Institute of Physics 2001
33 저널기사 The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition/ 미리보기
Ito, Natsuko Published for the Society by the American Institute of Physics 2001
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