| 자료유형 | 연속간행물 |
|---|---|
| 단체저자명 | IEEE Components, Hybrids, and Manufacturing Technology Society. IEEE Electron Devices Society. IEEE Reliability Society. IEEE Solid-State Circuits Council. Institute of Electrical and Electronics Engineers. |
| 서명/저자사항 | IEEE transactions on semiconductor manufacturing:a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council. |
| 권.연차 사항 | Vol. 1, no. 1 (Feb. 1988)- |
| 발행사항 | New York, N.Y.: Institute of Electrical and Electronics Engineers, c1988-9999. |
| 형태사항 | v.: ill.; 28 cm. |
| 딸림자료 | |
| 간행빈도 | Quarterly |
| 축약서명 | IEEE trans. semicond. manuf. |
| 등록서명 | IEEE transactions on semiconductor manufacturing |
| 부분서명 | Transactions on semiconductor manufacturing. |
| 부분서명 | Semiconductor manufacturing. |
| ISSN | 0894-6507 |
| 일반주기 |
Title from cover.
|
| 이용가능한 다른형태자료 | Available in microfiche and microfilm. |
| 일반주제명 | Semiconductors -- Design and construction -- Periodicals. |
| 언어 | 영어 |
| No. | 권호·제본정보 보기 | 소장처 | 소장사항 | 청구기호 | 구독 | 최근입수호 |
|---|---|---|---|---|---|---|
| 1 | 중앙도서관/3층 연속간행물(보존)/ | 621.38152 I22a | 구독중단 | Vol.13 No.4 | ||
| 2 | 중앙도서관/3층 연속간행물실/ | 621.38152 I22a | 구독중단 |